JPS5366255A - Minute dimension measuring method and its apparatus - Google Patents

Minute dimension measuring method and its apparatus

Info

Publication number
JPS5366255A
JPS5366255A JP14129876A JP14129876A JPS5366255A JP S5366255 A JPS5366255 A JP S5366255A JP 14129876 A JP14129876 A JP 14129876A JP 14129876 A JP14129876 A JP 14129876A JP S5366255 A JPS5366255 A JP S5366255A
Authority
JP
Japan
Prior art keywords
measuring method
dimension measuring
minute dimension
minute
pattern image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14129876A
Other languages
English (en)
Other versions
JPS5631524B2 (ja
Inventor
Yasuhiko Hara
Kenichi Isoda
Yukio Uto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14129876A priority Critical patent/JPS5366255A/ja
Publication of JPS5366255A publication Critical patent/JPS5366255A/ja
Publication of JPS5631524B2 publication Critical patent/JPS5631524B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP14129876A 1976-11-26 1976-11-26 Minute dimension measuring method and its apparatus Granted JPS5366255A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14129876A JPS5366255A (en) 1976-11-26 1976-11-26 Minute dimension measuring method and its apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14129876A JPS5366255A (en) 1976-11-26 1976-11-26 Minute dimension measuring method and its apparatus

Publications (2)

Publication Number Publication Date
JPS5366255A true JPS5366255A (en) 1978-06-13
JPS5631524B2 JPS5631524B2 (ja) 1981-07-22

Family

ID=15288622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14129876A Granted JPS5366255A (en) 1976-11-26 1976-11-26 Minute dimension measuring method and its apparatus

Country Status (1)

Country Link
JP (1) JPS5366255A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04142410A (ja) * 1990-10-03 1992-05-15 Toshiba Corp 形状認識装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04142410A (ja) * 1990-10-03 1992-05-15 Toshiba Corp 形状認識装置

Also Published As

Publication number Publication date
JPS5631524B2 (ja) 1981-07-22

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