JPS61285383A - 窒化ホウ素るつぼ及びその製法 - Google Patents

窒化ホウ素るつぼ及びその製法

Info

Publication number
JPS61285383A
JPS61285383A JP60125231A JP12523185A JPS61285383A JP S61285383 A JPS61285383 A JP S61285383A JP 60125231 A JP60125231 A JP 60125231A JP 12523185 A JP12523185 A JP 12523185A JP S61285383 A JPS61285383 A JP S61285383A
Authority
JP
Japan
Prior art keywords
wall
crucible
thickness
pbn
boron nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60125231A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0455160B2 (mo
Inventor
丹治　宏彰
正治 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP60125231A priority Critical patent/JPS61285383A/ja
Priority to US06/866,823 priority patent/US4773852A/en
Priority to DE8686107961T priority patent/DE3668162D1/de
Priority to EP86107961A priority patent/EP0206120B1/en
Publication of JPS61285383A publication Critical patent/JPS61285383A/ja
Priority to US07/319,902 priority patent/US4913652A/en
Publication of JPH0455160B2 publication Critical patent/JPH0455160B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP60125231A 1985-06-11 1985-06-11 窒化ホウ素るつぼ及びその製法 Granted JPS61285383A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP60125231A JPS61285383A (ja) 1985-06-11 1985-06-11 窒化ホウ素るつぼ及びその製法
US06/866,823 US4773852A (en) 1985-06-11 1986-05-22 Pyrolytic boron nitride crucible and method for producing the same
DE8686107961T DE3668162D1 (de) 1985-06-11 1986-06-11 Tiegel aus pyrolytischem bornitrid und verfahren zu seiner herstellung.
EP86107961A EP0206120B1 (en) 1985-06-11 1986-06-11 Pyrolytic boron nitride crucible and method for producing the same
US07/319,902 US4913652A (en) 1985-06-11 1989-03-03 Pyrolytic boron nitride crucible and method for producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60125231A JPS61285383A (ja) 1985-06-11 1985-06-11 窒化ホウ素るつぼ及びその製法

Publications (2)

Publication Number Publication Date
JPS61285383A true JPS61285383A (ja) 1986-12-16
JPH0455160B2 JPH0455160B2 (mo) 1992-09-02

Family

ID=14905060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60125231A Granted JPS61285383A (ja) 1985-06-11 1985-06-11 窒化ホウ素るつぼ及びその製法

Country Status (1)

Country Link
JP (1) JPS61285383A (mo)

Also Published As

Publication number Publication date
JPH0455160B2 (mo) 1992-09-02

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