JPS6283399A - 液相エピタキシヤル成長用ボ−ト - Google Patents

液相エピタキシヤル成長用ボ−ト

Info

Publication number
JPS6283399A
JPS6283399A JP60222098A JP22209885A JPS6283399A JP S6283399 A JPS6283399 A JP S6283399A JP 60222098 A JP60222098 A JP 60222098A JP 22209885 A JP22209885 A JP 22209885A JP S6283399 A JPS6283399 A JP S6283399A
Authority
JP
Japan
Prior art keywords
chamber
epitaxial growth
liquid phase
phase epitaxial
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60222098A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0260640B2 (2
Inventor
Susumu Yoshida
進 吉田
Takao Oda
織田　隆雄
Katsumi Sato
克己 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60222098A priority Critical patent/JPS6283399A/ja
Priority to US06/904,706 priority patent/US4768463A/en
Publication of JPS6283399A publication Critical patent/JPS6283399A/ja
Publication of JPH0260640B2 publication Critical patent/JPH0260640B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/063—Sliding boat system

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP60222098A 1985-10-04 1985-10-04 液相エピタキシヤル成長用ボ−ト Granted JPS6283399A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60222098A JPS6283399A (ja) 1985-10-04 1985-10-04 液相エピタキシヤル成長用ボ−ト
US06/904,706 US4768463A (en) 1985-10-04 1986-09-08 Boat for liquid phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60222098A JPS6283399A (ja) 1985-10-04 1985-10-04 液相エピタキシヤル成長用ボ−ト

Publications (2)

Publication Number Publication Date
JPS6283399A true JPS6283399A (ja) 1987-04-16
JPH0260640B2 JPH0260640B2 (2) 1990-12-17

Family

ID=16777102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60222098A Granted JPS6283399A (ja) 1985-10-04 1985-10-04 液相エピタキシヤル成長用ボ−ト

Country Status (2)

Country Link
US (1) US4768463A (2)
JP (1) JPS6283399A (2)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7182192B2 (en) 2004-11-08 2007-02-27 Lexmark International, Inc. Clutch mechanism and method for moving media within an image forming apparatus
US7905197B2 (en) * 2008-10-28 2011-03-15 Athenaeum, Llc Apparatus for making epitaxial film
US8193078B2 (en) 2008-10-28 2012-06-05 Athenaeum, Llc Method of integrating epitaxial film onto assembly substrate
US20100102419A1 (en) * 2008-10-28 2010-04-29 Eric Ting-Shan Pan Epitaxy-Level Packaging (ELP) System

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843425A (2) * 1971-10-05 1973-06-23
JPS5734099A (en) * 1980-08-06 1982-02-24 Mitsubishi Electric Corp Epitaxial growth of liquid phase
JPS6077193A (ja) * 1983-10-03 1985-05-01 Mitsubishi Electric Corp 液相エピタキシヤル結晶成長装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5120081A (en) * 1974-08-12 1976-02-17 Hitachi Ltd Ketsushoseichohoho oyobi sochi
SE443583B (sv) * 1982-11-12 1986-03-03 Ericsson Telefon Ab L M Anordning vid vetskefasepitaxi
US4574730A (en) * 1984-02-27 1986-03-11 Northern Telecom Limited Melt dispensing liquid phase epitaxy boat

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843425A (2) * 1971-10-05 1973-06-23
JPS5734099A (en) * 1980-08-06 1982-02-24 Mitsubishi Electric Corp Epitaxial growth of liquid phase
JPS6077193A (ja) * 1983-10-03 1985-05-01 Mitsubishi Electric Corp 液相エピタキシヤル結晶成長装置

Also Published As

Publication number Publication date
JPH0260640B2 (2) 1990-12-17
US4768463A (en) 1988-09-06

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