JPS63149961U - - Google Patents
Info
- Publication number
- JPS63149961U JPS63149961U JP2312287U JP2312287U JPS63149961U JP S63149961 U JPS63149961 U JP S63149961U JP 2312287 U JP2312287 U JP 2312287U JP 2312287 U JP2312287 U JP 2312287U JP S63149961 U JPS63149961 U JP S63149961U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- injection hole
- vapor deposition
- electron beam
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000007740 vapor deposition Methods 0.000 claims 2
- 239000010408 film Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
図面は本考案実施例の縦断面図である。
１……電子銃、２……るつぼ、３……ノズル、
３ａ……噴射孔、４……基板、５……コア、６…
…巻線。
３ａ……噴射孔、４……基板、５……コア、６…
…巻線。
Claims (1)
- ノズルを備えたるつぼ内の蒸着材料を真空雰囲
中で加熱することにより、その材料を上記ノズル
の噴射孔から上記るつぼ外部に蒸発させて試料表
面に蒸着膜を形成する装置であつて、上記加熱手
段を電子銃と、この電子銃からの電子ビームを偏
向させる偏向装置とから構成し、偏向された電子
ビームが、上記ノズルの噴射孔を通過し上記蒸着
材料に衝突するとともに、上記ノズルに衝突する
よう構成したことを特徴とする、真空蒸着法によ
る薄膜製造装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2312287U JPS63149961U (ja) | 1987-02-19 | 1987-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2312287U JPS63149961U (ja) | 1987-02-19 | 1987-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63149961U true JPS63149961U (ja) | 1988-10-03 |
Family
ID=30821151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2312287U Pending JPS63149961U (ja) | 1987-02-19 | 1987-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63149961U (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56163265A (en) * | 1980-05-19 | 1981-12-15 | Rohm Co Ltd | Vapor depositing apparatus |
-
1987
- 1987-02-19 JP JP2312287U patent/JPS63149961U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56163265A (en) * | 1980-05-19 | 1981-12-15 | Rohm Co Ltd | Vapor depositing apparatus |
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