JPS648471B2 - - Google Patents

Info

Publication number
JPS648471B2
JPS648471B2 JP54019769A JP1976979A JPS648471B2 JP S648471 B2 JPS648471 B2 JP S648471B2 JP 54019769 A JP54019769 A JP 54019769A JP 1976979 A JP1976979 A JP 1976979A JP S648471 B2 JPS648471 B2 JP S648471B2
Authority
JP
Japan
Prior art keywords
polysilicon
oxide film
doped
phosphorus
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54019769A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55113324A (en
Inventor
Jun Murata
Kuniki Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP1976979A priority Critical patent/JPS55113324A/ja
Publication of JPS55113324A publication Critical patent/JPS55113324A/ja
Publication of JPS648471B2 publication Critical patent/JPS648471B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP1976979A 1979-02-23 1979-02-23 Manufacture of semiconductor device Granted JPS55113324A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976979A JPS55113324A (en) 1979-02-23 1979-02-23 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976979A JPS55113324A (en) 1979-02-23 1979-02-23 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS55113324A JPS55113324A (en) 1980-09-01
JPS648471B2 true JPS648471B2 (th) 1989-02-14

Family

ID=12008532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976979A Granted JPS55113324A (en) 1979-02-23 1979-02-23 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS55113324A (th)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58100451A (ja) * 1981-12-10 1983-06-15 Oki Electric Ind Co Ltd 半導体装置の製造方法
JPS61198664A (ja) * 1985-02-27 1986-09-03 Sharp Corp 半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4915373A (th) * 1972-05-18 1974-02-09

Also Published As

Publication number Publication date
JPS55113324A (en) 1980-09-01

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