LV12724B - Linear aperture deposition apparatus and containig process - Google Patents

Linear aperture deposition apparatus and containig process Download PDF

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Publication number
LV12724B
LV12724B LVP-01-75A LV010075A LV12724B LV 12724 B LV12724 B LV 12724B LV 010075 A LV010075 A LV 010075A LV 12724 B LV12724 B LV 12724B
Authority
LV
Latvia
Prior art keywords
substrate
coating
feed tank
raw material
ratio
Prior art date
Application number
LVP-01-75A
Other languages
English (en)
Latvian (lv)
Other versions
LV12724A (lv
Inventor
Matthew R. WITZMAN
JR. Richard A. BRADLER
Christopher W. Lantman
Eric R. COX
Original Assignee
Flex Products, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Flex Products, Inc. filed Critical Flex Products, Inc.
Publication of LV12724A publication Critical patent/LV12724A/xx
Publication of LV12724B publication Critical patent/LV12724B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal
    • Y10T428/31681—Next to polyester, polyamide or polyimide [e.g., alkyd, glue, or nylon, etc.]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
LVP-01-75A 1998-11-12 2001-05-23 Linear aperture deposition apparatus and containig process LV12724B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10818798P 1998-11-12 1998-11-12
US09/437,684 US6202591B1 (en) 1998-11-12 1999-11-10 Linear aperture deposition apparatus and coating process
PCT/US1999/026904 WO2000028103A2 (fr) 1998-11-12 1999-11-12 Appareil a ouvertures lineaires de depot et procede de revetement

Publications (2)

Publication Number Publication Date
LV12724A LV12724A (lv) 2001-09-20
LV12724B true LV12724B (en) 2002-01-20

Family

ID=26805612

Family Applications (1)

Application Number Title Priority Date Filing Date
LVP-01-75A LV12724B (en) 1998-11-12 2001-05-23 Linear aperture deposition apparatus and containig process

Country Status (8)

Country Link
US (3) US6202591B1 (fr)
EP (1) EP1135542B1 (fr)
JP (1) JP4743964B2 (fr)
CN (1) CN1243122C (fr)
CA (1) CA2350319C (fr)
IL (2) IL143076A0 (fr)
LV (1) LV12724B (fr)
WO (1) WO2000028103A2 (fr)

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US20010021455A1 (en) 2001-09-13
EP1135542A2 (fr) 2001-09-26
IL143076A (en) 2007-05-15
CA2350319A1 (fr) 2000-05-18
US20010011524A1 (en) 2001-08-09
CA2350319C (fr) 2008-03-11
US6202591B1 (en) 2001-03-20
JP4743964B2 (ja) 2011-08-10
LV12724A (lv) 2001-09-20
JP2003502494A (ja) 2003-01-21
IL143076A0 (en) 2002-04-21
EP1135542B1 (fr) 2014-02-19
CN1243122C (zh) 2006-02-22
WO2000028103A2 (fr) 2000-05-18
US6367414B2 (en) 2002-04-09
WO2000028103A3 (fr) 2000-08-31

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