ATE147544T1 - Verfahren zur herstellung einer dünnfilm- halbleitervorrichtung - Google Patents

Verfahren zur herstellung einer dünnfilm- halbleitervorrichtung

Info

Publication number
ATE147544T1
ATE147544T1 AT91106048T AT91106048T ATE147544T1 AT E147544 T1 ATE147544 T1 AT E147544T1 AT 91106048 T AT91106048 T AT 91106048T AT 91106048 T AT91106048 T AT 91106048T AT E147544 T1 ATE147544 T1 AT E147544T1
Authority
AT
Austria
Prior art keywords
semiconductor device
producing
thin film
insulating film
film semiconductor
Prior art date
Application number
AT91106048T
Other languages
English (en)
Inventor
Hitoshi Shindo
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE147544T1 publication Critical patent/ATE147544T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0321—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon
    • H10D30/0323—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon comprising monocrystalline silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
    • H10D30/6743—Silicon
    • H10D30/6744—Monocrystalline silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/19—Preparing inhomogeneous wafers
    • H10P90/1904—Preparing vertically inhomogeneous wafers
    • H10P90/1906—Preparing SOI wafers
    • H10P90/1908—Preparing SOI wafers using silicon implanted buried insulating layers, e.g. oxide layers [SIMOX]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials
    • H10W10/181—Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers

Landscapes

  • Thin Film Transistor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Crystal (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
AT91106048T 1990-04-17 1991-04-16 Verfahren zur herstellung einer dünnfilm- halbleitervorrichtung ATE147544T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9934690 1990-04-17
JP3106543A JPH04226079A (ja) 1990-04-17 1991-04-12 半導体装置及びその製造方法及びそれを有する電子回路装置

Publications (1)

Publication Number Publication Date
ATE147544T1 true ATE147544T1 (de) 1997-01-15

Family

ID=26440490

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91106048T ATE147544T1 (de) 1990-04-17 1991-04-16 Verfahren zur herstellung einer dünnfilm- halbleitervorrichtung

Country Status (5)

Country Link
US (1) US5510640A (de)
EP (1) EP0461362B1 (de)
JP (1) JPH04226079A (de)
AT (1) ATE147544T1 (de)
DE (1) DE69124012T2 (de)

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US5364800A (en) * 1993-06-24 1994-11-15 Texas Instruments Incorporated Varying the thickness of the surface silicon layer in a silicon-on-insulator substrate
US5773328A (en) 1995-02-28 1998-06-30 Sgs-Thomson Microelectronics, Inc. Method of making a fully-dielectric-isolated fet
US5726720A (en) * 1995-03-06 1998-03-10 Canon Kabushiki Kaisha Liquid crystal display apparatus in which an insulating layer between the source and substrate is thicker than the insulating layer between the drain and substrate
KR100189966B1 (ko) * 1995-06-13 1999-06-01 윤종용 소이 구조의 모스 트랜지스터 및 그 제조방법
US5665644A (en) * 1995-11-03 1997-09-09 Micron Technology, Inc. Semiconductor processing method of forming electrically conductive interconnect lines and integrated circuitry
US6909179B2 (en) * 1996-03-18 2005-06-21 Renesas Technology Corp. Lead frame and semiconductor device using the lead frame and method of manufacturing the same
US6091150A (en) * 1996-09-03 2000-07-18 Micron Technology, Inc. Integrated circuitry comprising electrically insulative material over interconnect line tops, sidewalls and bottoms
US5930642A (en) * 1997-06-09 1999-07-27 Advanced Micro Devices, Inc. Transistor with buried insulative layer beneath the channel region
US6172402B1 (en) * 1998-06-04 2001-01-09 Advanced Micro Devices Integrated circuit having transistors that include insulative punchthrough regions and method of formation
JP3417866B2 (ja) * 1999-03-11 2003-06-16 株式会社東芝 半導体装置およびその製造方法
US6437404B1 (en) * 2000-08-10 2002-08-20 Advanced Micro Devices, Inc. Semiconductor-on-insulator transistor with recessed source and drain
US6414355B1 (en) 2001-01-26 2002-07-02 Advanced Micro Devices, Inc. Silicon-on-insulator (SOI) chip having an active layer of non-uniform thickness
US6548369B1 (en) * 2001-03-20 2003-04-15 Advanced Micro Devices, Inc. Multi-thickness silicon films on a single semiconductor-on-insulator (SOI) chip using simox
US6884702B2 (en) * 2002-06-04 2005-04-26 Advanced Micro Devices, Inc. Method of making an SOI semiconductor device having enhanced, self-aligned dielectric regions in the bulk silicon substrate
KR100507344B1 (ko) * 2003-04-17 2005-08-08 삼성에스디아이 주식회사 박막 트랜지스터 및 그의 제조 방법
US7247569B2 (en) * 2003-12-02 2007-07-24 International Business Machines Corporation Ultra-thin Si MOSFET device structure and method of manufacture
WO2005062364A1 (en) * 2003-12-16 2005-07-07 International Business Machines Corporation Contoured insulator layer of silicon-on-onsulator wafers and process of manufacture
US7812397B2 (en) * 2005-09-29 2010-10-12 International Business Machines Corporation Ultra thin channel (UTC) MOSFET structure formed on BOX regions having different depths and different thicknesses beneath the UTC and source/drain regions and method of manufacture thereof
US20070069300A1 (en) * 2005-09-29 2007-03-29 International Business Machines Corporation Planar ultra-thin semiconductor-on-insulator channel mosfet with embedded source/drain
US7955909B2 (en) * 2008-03-28 2011-06-07 International Business Machines Corporation Strained ultra-thin SOI transistor formed by replacement gate
KR102867556B1 (ko) 2010-02-26 2025-10-13 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
WO2011132625A1 (en) 2010-04-23 2011-10-27 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of semiconductor device
US9466729B1 (en) 2015-05-08 2016-10-11 Qualcomm Incorporated Etch stop region based fabrication of bonded semiconductor structures

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Publication number Priority date Publication date Assignee Title
CA1040321A (en) * 1974-07-23 1978-10-10 Alfred C. Ipri Polycrystalline silicon resistive device for integrated circuits and method for making same
JPS56135967A (en) * 1980-03-27 1981-10-23 Toshiba Corp Manufacture of semiconductor device
JPS6020582A (ja) * 1983-07-14 1985-02-01 Nec Corp Ｍｉｓトランジスタ及びその製造方法
JPS60117782A (ja) * 1983-11-30 1985-06-25 Fujitsu Ltd Ｍｏｓ型電界効果トランジスタ及びその製造方法
US4654958A (en) * 1985-02-11 1987-04-07 Intel Corporation Process for forming isolated silicon regions and field-effect devices on a silicon substrate
FR2590394B1 (fr) * 1985-11-15 1987-12-18 Thomson Csf Ecran de visualisation electro-optique a transistors de commande
JPH0620140B2 (ja) * 1986-06-11 1994-03-16 株式会社日立製作所 薄膜トランジスタ
US4741964A (en) * 1986-07-17 1988-05-03 International Business Machines Corporation Structure containing hydrogenated amorphous silicon and process
GB2198869B (en) * 1986-12-19 1990-08-15 Philips Electronic Associated Matrix display devices
EP0296603A3 (de) * 1987-06-26 1989-02-08 Canon Kabushiki Kaisha Photoelektrischer Umwandler
WO1989002095A1 (en) * 1987-08-27 1989-03-09 Hughes Aircraft Company Lcmos displays fabricated with implant treated silicon wafers
JPS6472557A (en) * 1987-09-11 1989-03-17 Seiko Instr & Electronics Image sensor
JPH0225036A (ja) * 1988-07-13 1990-01-26 Hitachi Ltd 半導体装置の製造方法
JP2755614B2 (ja) * 1988-09-29 1998-05-20 株式会社東芝 半導体装置の製造方法
EP0377084B1 (de) * 1988-10-03 1994-06-22 Kabushiki Kaisha Toshiba Feldeffekttransistor auf einem Isolator und Verfahren zu seiner Herstellung

Also Published As

Publication number Publication date
EP0461362B1 (de) 1997-01-08
JPH04226079A (ja) 1992-08-14
EP0461362A3 (en) 1992-03-04
US5510640A (en) 1996-04-23
DE69124012T2 (de) 1997-07-31
EP0461362A2 (de) 1991-12-18
DE69124012D1 (de) 1997-02-20

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Legal Events

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