JPH0173925U - - Google Patents

Info

Publication number
JPH0173925U
JPH0173925U JP1987169700U JP16970087U JPH0173925U JP H0173925 U JPH0173925 U JP H0173925U JP 1987169700 U JP1987169700 U JP 1987169700U JP 16970087 U JP16970087 U JP 16970087U JP H0173925 U JPH0173925 U JP H0173925U
Authority
JP
Japan
Prior art keywords
heat treatment
wafer
plate
treatment jig
upper plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987169700U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987169700U priority Critical patent/JPH0173925U/ja
Publication of JPH0173925U publication Critical patent/JPH0173925U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案にかかるウエーハ熱処理用治具
の一実施例を示す斜視図、第２図は同従来例を示
す斜視図である。 １０…ウエーハ熱処理用治具、１１…支持柱体
、１１ａ…スリツト溝、１２…下部板状体、１３
…上部板状体、１４…補強帯板。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体ウエーハを挿入載置するためのスリツト
    溝が形成された複数のウエーハ支持柱体の両端部
    に対し下部板状体および上部板状体がそれぞれ結
    合されてなるウエーハ熱処理用治具において、前
    記下部板状体および上部板状体の間の少なくとも
    一箇所で前記複数のウエーハ支持柱体を補強帯板
    により互いに連結してなることを特徴とするウエ
    ーハ熱処理用治具。
JP1987169700U 1987-11-06 1987-11-06 Pending JPH0173925U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987169700U JPH0173925U (ja) 1987-11-06 1987-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987169700U JPH0173925U (ja) 1987-11-06 1987-11-06

Publications (1)

Publication Number Publication Date
JPH0173925U true JPH0173925U (ja) 1989-05-18

Family

ID=31459992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987169700U Pending JPH0173925U (ja) 1987-11-06 1987-11-06

Country Status (1)

Country Link
JP (1) JPH0173925U (ja)

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