JPH0321844U - - Google Patents

Info

Publication number
JPH0321844U
JPH0321844U JP8284289U JP8284289U JPH0321844U JP H0321844 U JPH0321844 U JP H0321844U JP 8284289 U JP8284289 U JP 8284289U JP 8284289 U JP8284289 U JP 8284289U JP H0321844 U JPH0321844 U JP H0321844U
Authority
JP
Japan
Prior art keywords
wafer
susceptor
heater cover
heater
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8284289U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8284289U priority Critical patent/JPH0321844U/ja
Publication of JPH0321844U publication Critical patent/JPH0321844U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案装置の一実施例の構成を示す簡
略縦断面図、第２図は本考案におけるウエーハの
温度分布の説明図、第３図は従来装置の一例の構
成を示す簡略縦断面図、第４図は従来におけるウ
エーハの温度分布の説明図である。 １…反応室、２…サセプタ、３…ウエーハ、４
…ヒータカバー、５…ヒータ、６…リング状回転
部、７…回転駆動部、１２…支承部。

Claims (1)

    【実用新案登録請求の範囲】
  1. 反応室１内に反応ガスを導入しつつ排気し、サ
    セプタ２上のウエーハ３をヒータカバー４で仕切
    られたヒータ５により加熱し、かつ当該サセプタ
    ２を回転することによりウエーハ３に薄膜を生成
    する化学気相生成装置において、反応室１にリン
    グ状回転部６を支承し、この回転部６にヒータカ
    バー４を取付け、このヒータカバー４上にはウエ
    ーハ３を載置したサセプタ２を設置すると共にリ
    ング状回転部６に回転駆動部７を連結せしめてな
    る化学気相生成装置。
JP8284289U 1989-07-14 1989-07-14 Pending JPH0321844U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8284289U JPH0321844U (ja) 1989-07-14 1989-07-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8284289U JPH0321844U (ja) 1989-07-14 1989-07-14

Publications (1)

Publication Number Publication Date
JPH0321844U true JPH0321844U (ja) 1991-03-05

Family

ID=31630008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8284289U Pending JPH0321844U (ja) 1989-07-14 1989-07-14

Country Status (1)

Country Link
JP (1) JPH0321844U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006222372A (ja) * 2005-02-14 2006-08-24 Nippon Telegr & Teleph Corp <Ntt> 酸化炉装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006222372A (ja) * 2005-02-14 2006-08-24 Nippon Telegr & Teleph Corp <Ntt> 酸化炉装置

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