JPS6227754B2 - - Google Patents

Info

Publication number
JPS6227754B2
JPS6227754B2 JP55181004A JP18100480A JPS6227754B2 JP S6227754 B2 JPS6227754 B2 JP S6227754B2 JP 55181004 A JP55181004 A JP 55181004A JP 18100480 A JP18100480 A JP 18100480A JP S6227754 B2 JPS6227754 B2 JP S6227754B2
Authority
JP
Japan
Prior art keywords
film
electrode
forming
recess
gate electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55181004A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57104267A (en
Inventor
Masahiro Hagio
Atsushi Nagashima
Shutaro Nanbu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP55181004A priority Critical patent/JPS57104267A/ja
Publication of JPS57104267A publication Critical patent/JPS57104267A/ja
Publication of JPS6227754B2 publication Critical patent/JPS6227754B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP55181004A 1980-12-19 1980-12-19 Manufacture of semiconductor device Granted JPS57104267A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55181004A JPS57104267A (en) 1980-12-19 1980-12-19 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55181004A JPS57104267A (en) 1980-12-19 1980-12-19 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57104267A JPS57104267A (en) 1982-06-29
JPS6227754B2 true JPS6227754B2 (cs) 1987-06-16

Family

ID=16093046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55181004A Granted JPS57104267A (en) 1980-12-19 1980-12-19 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57104267A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59224175A (ja) * 1983-06-03 1984-12-17 Nec Corp 電界効果トランジスタ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5381085A (en) * 1976-12-27 1978-07-18 Fujitsu Ltd Production of semiconductor device

Also Published As

Publication number Publication date
JPS57104267A (en) 1982-06-29

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