JPH0584666B2 - - Google Patents
Info
- Publication number
- JPH0584666B2 JPH0584666B2 JP60259089A JP25908985A JPH0584666B2 JP H0584666 B2 JPH0584666 B2 JP H0584666B2 JP 60259089 A JP60259089 A JP 60259089A JP 25908985 A JP25908985 A JP 25908985A JP H0584666 B2 JPH0584666 B2 JP H0584666B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- aluminum
- hole
- insulating film
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Local Oxidation Of Silicon (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25908985A JPS62222653A (ja) | 1985-11-18 | 1985-11-18 | 半導体装置及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25908985A JPS62222653A (ja) | 1985-11-18 | 1985-11-18 | 半導体装置及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62222653A JPS62222653A (ja) | 1987-09-30 |
| JPH0584666B2 true JPH0584666B2 (da) | 1993-12-02 |
Family
ID=17329159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25908985A Granted JPS62222653A (ja) | 1985-11-18 | 1985-11-18 | 半導体装置及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62222653A (da) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100241529B1 (ko) * | 1996-12-12 | 2000-02-01 | 김영환 | 플라즈마를 이용한 반도체 소자의 금속배선 부식방지방법 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51150985A (en) * | 1975-06-19 | 1976-12-24 | Mitsubishi Electric Corp | Fabrication method of semiconductor device |
| JPS526795A (en) * | 1975-07-07 | 1977-01-19 | Mitsubishi Rayon Co Ltd | Process for producing polyester polymers |
| JPS5261964A (en) * | 1975-11-18 | 1977-05-21 | Seiko Epson Corp | Semiconductor device |
| JPS5630744A (en) * | 1979-08-21 | 1981-03-27 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor device |
| JPS5831215B2 (ja) * | 1979-09-29 | 1983-07-05 | 森六株式会社 | 配位型高分子鉄（２）ポルフィリン錯体を有効成分としてなる酸素吸脱着剤 |
-
1985
- 1985-11-18 JP JP25908985A patent/JPS62222653A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62222653A (ja) | 1987-09-30 |
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